Adding fluorine to drug molecules can be tricky, but is often worthwhile. Rachel Brazil talks to the chemists trying to tame ...

Researchers find a faster way to etch deep holes for 3D NAND Plasma-based cryo-etching technique doubles etch speed, ...

The narrow, deep holes required for one type of flash memory are made twice as fast with the right recipe, which includes a plasma made from hydrogen fluoride.

Understanding the industrial importance and production of hydrogen fluoride requires a close look at the fluoride side of the molecule. Like chlorine and bromine, fluorine is one of the halogens ...

Owing to its small atomic size and covalent behaviour, the substitution of hydrogen or oxygen by fluorine in organic molecules usually results in a large number of new compounds of an interesting ...

Researchers from Lam Research, the University of Colorado Boulder, and Princeton Plasma Physics Laboratory (PPPL) investigated ways to speed up the cryogenic reactive ion etching process for 3D NAND ...