Adding fluorine to drug molecules can be tricky, but is often worthwhile. Rachel Brazil talks to the chemists trying to tame ...

The narrow, deep holes required for one type of flash memory are made twice as fast with the right recipe, which includes a plasma made from hydrogen fluoride.

3D NAND flash memory is different from traditional single-layer NAND because it vertically stacks memory cells to cram more ...

To improve data storage, researchers are perfecting 3D NAND flash memory, which stacks cells to maximize space. Researchers ...

Industry-driven phasedown efforts of a highly potent climate pollutant come with burgeoning concerns of PFAS exposure, and ...

This emerging approach is called cryo etching. Traditionally, cryo etching uses separate hydrogen and fluorine gases to make the holes. The researchers compared results from this process to a more ...

This emerging approach is called cryo etching. Traditionally, cryo etching uses separate hydrogen and fluorine gases to make the holes. The researchers compared results from this process to a more ...

This emerging approach is called cryo etching. Traditionally, cryo etching uses separate hydrogen and fluorine gases to make the holes. The researchers compared results from this process to a more ...

You're not alone if you have questions about fluoride in your water supply. We reached out to experts to get answers.

Researchers from Lam Research, the University of Colorado Boulder, and Princeton Plasma Physics Laboratory (PPPL) investigated ways to speed up the cryogenic reactive ion etching process for 3D NAND ...