On-site generated fluorine meets the sustainability requirements for the future of CVD thin-film process chamber cleaning. Rigorous industry safety standards are maintained, GWP and total carbon ...

Meanwhile, fluorine anion doping enhances the anionic interactions in the TM layer and adjusts the elemental valence state, which enlarges the interlayer spacing and improves the Na + migration rate.

Anomalous Born dynamical charges in perovskite oxides, such as BaTiO3 and KNbO3, are known to be indicators of their tendency to turn polar through cation off-centering and measure of the interaction ...