Standard NAND flash storage is used in microSD cards, USB drives, and solid-state drives in computers and phones. To fit more gigabytes into smaller spaces, manufacturers ...

From high-speed communication to quantum computing and sensing, the detection, transmission, and manipulation of light ...

3D NAND flash memory is different from traditional single-layer NAND because it vertically stacks memory cells to cram more ...

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Researchers from Lam Research, the University of Colorado Boulder, and Princeton Plasma Physics Laboratory (PPPL) investigated ways to speed up the cryogenic reactive ion etching process for 3D NAND ...

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To improve data storage, researchers are perfecting 3D NAND flash memory, which stacks cells to maximize space. Researchers ...

A critical step in creating these stacks involves carving holes into alternating layers of silicon oxide and silicon nitride. The holes can be etched by exposing the layered material to chemicals in ...

The narrow, deep holes required for one type of flash memory are made twice as fast with the right recipe, which includes a plasma made from hydrogen fluoride.

Division of Micro and Nanosystems (MST), School of Electrical Engineering and Computer Science (EECS), KTH Royal Institute of Technology, Stockholm SE-10044, Sweden Division of Micro and Nanosystems ...